THIN FILM ANALYSIS & MATERIAL SCIENCE

tec5USA Equipment Applications for Thin Film Analysis

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Chemical vapor deposition is a technique which a volatile material is vaporized within a chamber to either decompose or chemically react with another vapor and deposit the product onto a target (i.e. substrate). The deposited material is engineered for various purposes, from metal materials for conductivity to insulators or semiconductors 

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Chemical Vapor Deposition Process Monitoring

The CVD process can be monitored in-situ or at-line. For in-situ monitoring, the pressure of the reactants can typically be measured via UV/Vis spectroscopy. The absorption strength of the gasses can be directedly correlated to the pressure of each. With the pressure feedback from the spectrometer system, the stability of the gas can be maintained, or rapidly corrected, which then corresponds to a higher accuracy of deposition on the substrate.

At-line monitoring of the deposition process can be performed using tec5USA systems via white light interference. This measurement technique provides the film thickness of deposited layers on the substrate.

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    Typical applications include white light interference for thin film analysis, UV absorption of proteins for quantitative analysis, colorimetry, impurity detection in water, cleaning validation for API manufacturing, polymerization inhibitor monitoring, electroplating bath monitoring....

    The spectroscopic methodology is determined by which parameters are important to monitor during a process. For example, if you want to monitor protein concentration in a bioreactor, in which the biosynthesis takes place in an aqueous medium, then you likely would want to use Raman spectroscopy for the application, as water does not contribute to the Raman signal. Alternatively, if moisture content is important, water has very strong absorption in the NIR due to several vibrational and combination modes that can be monitored; water is transparent in the UV and visible spectral region. Understanding which chemical is important as there could be various factors that influence the choice of methodology....

    NIR spectroscopy is utilized across a variety of industries for qualitative and quantitative product analysis. Typical industries include Chemistry, Pharmacology, Food Feed & Beverage, Agriculture, and others. NIR spectroscopy is well suited for species containing C-H, N-H & O-H bonds, making it a wide-range technology for a variety of applications such as moisture, fat, oil, alcohol, APIs, polymers, etc....

    Raman spectroscopy is a technique which is used for several markets. These industries include Oil and Gas, Pharmacology, Biotechnology, Petrochemistry and many others. Due to the high selectivity of Raman spectroscopy, it is a powerful tool for many applications including, hydrocarbon analysis, bioreactor protein monitoring, crystallization monitoring, API concentration, polymer identification, surfactant analysis, natural gas components and several others....

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